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Overview

The sensor element of the MS52XX consists of a micromachined silicone membrane with borosilicate glass waferbonded under vacuum to the back-side for reference pressure. Implanted resistors make use of the piezo-resistive effect to sense pressure applied to the membrane. The sensor is mounted in a special process allowing best-offset stability making the part suitable for direct PCB assembly.

Features

  • 12 bar absolute pressure range 
  • Uncompensated 
  • Piezoresistive silicon micromachined sensor  
  • Surface mount 7.6 x 7.6 mm 
  • Low-noise, high-sensitivity, high-linearity
  • Low-cost SMD ceramic package
  • High-reliability, low-drift 
  • -40 °C to +125 °C operation range  
  • Optional: Gel protection against humidity and water

Applications

Typical applications for this miniaturized pressure sensor MS52XX are:

Features

Please review product documents or contact us for the latest agency approval information.  

Product Type Features

  • Sensor Package  Surface Mountable

  • Pressure Sensor Type  mV Output Pressure Sensors

  • Pressure Type  Gauge

Electrical Characteristics

  • Supply Voltage Range (V) 5

Dimensions

  • Product Width  7.6 mm [ .299 in ]

  • Product Length  7.6 mm [ .3 in ]

  • Product Height  4.28 mm [ .168 in ]

Usage Conditions

  • Pressure (bar) 12

  • Operating Temperature Range  -40 – 125 °C [ -40 – 257 °F ]

Operation/Application

  • Proof Pressure Range  10 bar

  • Output Signal Type  150mV

  • Pressure Accuracy  ±0.05/0.15% F.S. Non-Linearity

Other

  • Sensor Options  High Linearity with Transparent Gel

Related Materials

Datasheets & Catalog Pages