The device consists of a silicon micromachined pressure sensor die mounted on a 7.6 x 7.6 mm ceramic carrier protected by a metal cap. The MS52XX can be delivered in a highly-sensitive version giving a maximal output voltage or in a highly-linear version giving a linear output voltage directly proportional to the applied pressure.
1, and 12 bar absolute pressure range
Piezoresistive silicon micromachined sensor
Surface mount 7.6 x 7.6 mm
Low-noise, high-sensitivity, high-linearity
Low-cost SMD ceramic package
-40 °C to +125 °C operation range
Optional: Gel protection against humidity and water