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  • Overview

This product is not currently available. For more information, including distributor inventory, please contact us.

Ultrasonic Micro Measurement System

Ultrasonic Micro Measurement System-CAT-ULT0007
  • MEAS
|
  • SL-900
The SL-900 series ultrasonic micro-measurement system is an ideal solution for the detection and measurement of ultra-pure chemical fluids in the semiconductor industries.
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Product Features

  • Ultrasonic Sensor Type : Point Liquid Level Sensors

  • Ultrasonic Sensor Style : Contact

Available from

LADD Inc
Overview

Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The SL-900 series sensor provides single or multiple discrete point levels with a very high degree of precision. This ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors. 

Features

  • 316 L stainless steel machined sensor body
  • Sensor material has an electropolished finish (Ra = 25 µin – minimum)
  • Miniature sensor size reduces liquid volume displacement
  • High pressure vessel application up to 250 PSIG (1724 kPa) (consult factory for higher pressure applications)
  • Accuracy of each discrete point level is ±2 mm
  • Repeatability of ±1 mm is typical
  • Single point low level as close as 1/4” (6mm) from bottom of vessel for 5/8” tube and 5/16” for 1/2” tube
  • Works with the following chemicals independent of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA

Applications

  • Semiconductor industry
  • Pharmaceutical industry
  • High pressure vessels 
Features

Please review product documents or contact us for the latest agency approval information.  

Product Type Features

  • Ultrasonic Sensor Type  Point Liquid Level Sensors

  • Ultrasonic Sensor Style  Contact

Electrical Characteristics

  • Output Type  Dual Color LED and ½ A Relay

Usage Conditions

  • Operating Temperature Range  -30 – 93 °C [ -22 – 198 °F ]

  • Pressure  17.2 bar [ 250 psi ]

Operation/Application

  • Actuation Point/Sensing Range  Variable

Other

  • Port Fitting  1/2 NPT | 3/4 VCR, Male/Female

Related Materials

Datasheets & Catalog Pages