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Overview

Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-900 Series provides single or multiple discrete point levels with a very high degree of precision. The SL-900 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors. 

BENEFITS

  • 316 L stainless steel machined sensor body
  • Sensor material has an electropolished finish (Ra = 25 µin – minimum)
  • Miniature sensor size reduces liquid volume displacement
  • Works with the following chemicals independent of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA
  • High pressure vessel application up to 250 PSIG (1724 kPa) (consult factory for higher pressure applications)
  • Accuracy of each discrete point level is ±2 mm
  • Repeatability of ±1 mm is typical
  • Single point low level as close as 1/4” (6mm) from bottom of vessel for 5/8” tube and 5/16” for 1/2” tube

APPLICATIONS

  • Semiconductor industries
  • Pharmaceutical industries 
  • High pressure vessels 

Features

Please review product documents or contact us for the latest agency approval information.  

Product Type Features

  • Sensor Type  Point Liquid Level Sensors

  • Type  Contact

Configuration Features

  • Cable  Up to 24" Shielded with Strain Relief, 9 Pin Connector

Electrical Characteristics

  • Output  Dual Color LED and ½ A Relay

  • Input  Variable

Operation/Application

  • Pressure Range  250 psi

  • Process Connection  1/2", 3/4" VCR, Male/Female

  • Actuation Point/Sensing Range  Variable

Other

Related Materials

Data Sheets/Catalog Pages

Terms and Conditions

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This information has been provided to your free of charge for your use but remains the sole property of TE Connectivity Corporation (''TE'') or SnapEDA,  Inc. or Ultra Librarian/EMA Design Automation, Inc. (collectively, "Company"). While Company has used reasonable efforts to ensure its accuracy, Company does not guarantee that it is error-free, not makes any other representation, warranty, or guarantee that the information is completely accurate or up-to-date. In many cases, the CAD data has been simplified to remove proprietary detail while maintaining critical interface geometric detail for use by customers. Company expressly disclaims all implied warranties regarding this information, including but not limited to any implied warranties or merchantability or fitness for a particular purpose.