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Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-900 Series provides single or multiple discrete point levels with a very high degree of precision. The SL-900 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors. 


  • 316 L stainless steel machined sensor body
  • Sensor material has an electropolished finish (Ra = 25 µin – minimum)
  • Miniature sensor size reduces liquid volume displacement
  • Works with the following chemicals independent of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA
  • High pressure vessel application up to 250 PSIG (1724 kPa) (consult factory for higher pressure applications)
  • Accuracy of each discrete point level is ±2 mm
  • Repeatability of ±1 mm is typical
  • Single point low level as close as 1/4” (6mm) from bottom of vessel for 5/8” tube and 5/16” for 1/2” tube


  • Semiconductor industries
  • Pharmaceutical industries 
  • High pressure vessels 


Please review product documents or contact us for the latest agency approval information.  

Product Type Features

  • Sensor Type  Point Liquid Level Sensors

  • Type  Contact

Configuration Features

  • Cable  Up to 24" Shielded with Strain Relief, 9 Pin Connector

Electrical Characteristics

  • Output  Dual Color LED and ½ A Relay

  • Input  Variable


  • Pressure Range  250 psi

  • Process Connection  1/2", 3/4" VCR, Male/Female

  • Actuation Point/Sensing Range  Variable


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