Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-900 Series provides single or multiple discrete point levels with a very high degree of precision. The SL-900 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.
316 L stainless steel machined sensor body
Sensor material has an electropolished finish (Ra = 25 µin – minimum)
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