The 85FBSD is a small profile, media compatible, piezo-resistive silicon pressure sensor packaged in a 316L stainless steel housing. The 85FBSD is designed for o-ring mounting where the diaphragm must not be shrouded by a weld ring or fitting.
This 14-bit digital output pressure sensor supports I2C and SPI interface protocols in either a 3.3 or 5.0VDC supply voltage. The sensing package utilizes silicone oil to transfer pressure from the 316L stainless steel diaphragm to the sensing element. The 85FBSD is designed for high performance, low pressure applications. A custom ASIC is used for temperature compensation, offset correction, and provides a digital output of 10~90% or 5~95%. For a similar sensor without flush mount, refer to the 85BSD digital output pressure sensor.
±1.0 Total Error Band
Low Power Option
I2C or SPI Interface Protocols
Kidney Dialysis Machines
Semiconductor Process Tools/ High Purity Gas Delivery Systems
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