Contact us to request more information about this model, including customization options

Contact Us
Overview

Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-900 Series provides single or multiple discrete point levels with a very high degree of precision. The SL-900 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors. 

BENEFITS

  • 316 L stainless steel machined sensor body
  • Sensor material has an electropolished finish (Ra = 25 µin – minimum)
  • Miniature sensor size reduces liquid volume displacement
  • Works with the following chemicals independent of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA
  • High pressure vessel application up to 250 PSIG (1724 kPa) (consult factory for higher pressure applications)
  • Accuracy of each discrete point level is ±2 mm
  • Repeatability of ±1 mm is typical
  • Single point low level as close as 1/4” (6mm) from bottom of vessel for 5/8” tube and 5/16” for 1/2” tube

APPLICATIONS

  • Semiconductor industries
  • Pharmaceutical industries 
  • High pressure vessels 
Features

Please review product documents or contact us for the latest agency approval information.  

Product Type Features

  • Sensor Type  Point Liquid Level Sensors

  • Type  Contact

Electrical Characteristics

  • Output  Dual Color LED and ½ A Relay

  • Input  Variable

Usage Conditions

Operation/Application

  • Actuation Point/Sensing Range  Variable

  • Pressure Range  250 psi

  • Process Connection  1/2", 3/4" VCR, Male/Female

Other

  • Cable  Up to 24" Shielded with Strain Relief, 9 Pin Connector

Related Materials

Terms and Conditions

Please carefully read the disclaimer before using any of this data.
Your use of this data constitutes your acceptance of the terms and conditions set forth below. If you do not agree to those terms and conditions, please click on the I Disagree link.

Disclaimer:
This information has been provided to you free of charge for your use but remains the sole property of Tyco Electronics Corporation ("TE"). While TE has used reasonable efforts to ensure its accuracy, TE does not guarantee that it is error-free, nor makes any other representation, warranty, or guarantee that the information is completely accurate or up-to-date. In many cases, the CAD data has been simplified to remove proprietary detail while maintaining critical interface geometric detail for use by customers. TE expressly disclaims all implied warranties regarding this information, including but not limited to any implied warranties or merchantability or fitness for a particular purpose.